Keysight (Agilent) 5517C

Optical Meters
Contact us for pricing and availability.
Description
The Agilent 5517C is used primarily in VME and PC based laser interferometer systems where the velocity of motion is faster, such as semiconductor lithography and flat panel applications. Option 009 allows a larger angular range of measurement by providing a 9 mm beam diameter for use with three-axis interferometers. Please contact us for custom requirements.

General

  • Max Velocity with Linear Optics: 711 mm/s
  • Reference frequency: 2.4 to 3.0 MHz
  • Weight: 3.4 kg (7.5 lb)
  • Clearance required for cabling: 10.16 cm (4 in) beyond back of unit

Laser Beam

  • Diameter: 6mm (0.25 in) typical

    Opt 003: 3 mm (0.125 in)

    Opt 009: 9 mm (0.375 in)
  • Minimum Output Power: 180 uW (standard)
  • Minimum Output Power: 300 uW (option H01)

Electrical Power

  • +15V ± 0.3V at 2.2A maximum
  • -15V ± 0.3V at 0.02A maximum
  • Warm-up Dissipation: 35W
  • Operating Dissipation: 23W

Reliability

  • Mean Time Between Failures (MTBF) greater than 50,000 hours of operation, most reliable lasers
List of Options
003 3mm output beam diameter
009 9mm output beam diameter
030 Replace standard feet with 3 electrically insulated feet
031 Replace Standard Feet with Referenced Foot
038 Delete standard mounting
A6J ANSI/NCSL Z540-1-1994 compliant calibration
AV4 User's manual
R-50C-011-3 Agilent Calibration - 3 years
R-50C-011-5 Agilent Calibration - 5 years
R-50C-016-3 ISO 17025 Compliant Calibration - 3 years
R-50C-016-5 ISO 17025 Compliant Calibration - 5 years
R-50C-021-3 ANSI Z540-1-1994 Calibration - 3 years
R-50C-021-5 ANSI Z540-1-1994 Calibration - 5 years
R-51B-001-5F Return to Agilent Warranty - 5 years
R-51B-001-F Return to Agilent Warranty - 3 years

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