General Features

• Flexible, expandable and upgradeable modular parametric instrument controlled via I/CV 3.0 Lite software
• Ultra low current measurement without external preamplifiers
• Flexible to provide stable 100aA measurements
• Switch between CV and IV measurement without wasting time swapping cables

Measurement Capabilities

• 1 femtoamp current measurement resolution without external preamplifiers (High-Resolution SMU)
• 100 attoamp current measurement resolution using HRSMU with Atto Sense & Switch Unit (ASU)
• 10 femtoamp and 0.5 microvolt measurement resolution (Medium-Power SMU)
• +/- 200 Volts and +/- 1 Amp output by High-Power SMU

I/CV 3.0 Lite Software Capabilities

• Drivers for all of the popular semiautomatic wafer probers
• Intuitive GUI-based switching matrix control for the B2200A, B2201A, and E5250A
• Test sequencer for automating testing across an entire wafer
• Post-test graphical analysis and wafer mapping capability