The Agilent 10895A VMEbus laser axis board supplies ultra-precise position (or distance) information for use in dimensional measurement and motion control system applications. The register-programmed position axis board provides a real-time hardware position output in 32-bit format. The output position is also readable over a VMEbus backplane.

As part of an Agilent VMEbus laser interferometer positioning system, the Agilent 10895A offers a high-performance solution for IC manufacturing, precision machining, and custom staging applications. The exceptional accuracy of the laser system allows the precise positioning and motion control required for consistent end-product production and quality.

Features:

• VMEbus Position Output
• Data Format:
• Units: fractions of a wavelength
• 2''s Complement: 32-bit parallel binary
• Positive Logic
• Least Significant Bit (or one count) equals resolution
• Data Rate Over Backplane >100kHz
• Data Age and Sample Ambiguity:
• After a sample operation, the value in the position register will reflect an actual position that occurred 0.1 to 1.4 us before the sample operation was initiated.
• Sample Delay:
• The position register may be read 1.5 us after a sample operation.
• P2 Connector Hardware Position Output
• Data Format:
• Units: fractions of a wavelength 2''s Complement: 32-bit parallel binary
• Positive Logic
• Least Significant Bit (or one count) equals resolution
• Data Update Rate:
• Agilent 5517A: 1.5-2.0 MHz
• Agilent 5517B: 1.9-2.4 MHz
• Agilent 5517C: 2.4-3.0 Mhz
• (Hardware included to synchronize to slower clocks)
• Data Age:
• Agilent 5517A: 2.1-4.1 us
• Agilent 5517B: 1.8-3.3 us
• Agilent 5517C: 1.5-2.7 us
• Data Age is dependent on the laser head reference signal (split-frequency) and by knowing exactly when, in relation to the rising edge of the Error Clock, the Position Error lines are sampled -- call this time deltaT. Data Age = ((0.34 us + delta T us)+(4.0 +/- 0.5) / (Reference in MHz)(us)) Additionally, the Data Age may vary up to 0.1 us typically and up to 0.25 us in a worst-case situation as a result of the reference frequency varying over time.
• System Performance with Agilent 10895A
• Maximum Axis Velocity*
• Laser Head
• Optics Resolution Range Agilent 5517A Agilent 5517B Agilent 5517C
• Linear or lambda/64 or +/-10.6 m 406 mm/sec 508 mm/sec 711 mm/sec Single Beam 10.0 nm (34.8 ft) (16 in/sec) (20 in/sec) (28 in/sec) (0.4 uin)
• Plane Mirror lambda/128 or +/-5.3 m 203 mm/sec 254 mm/sec 356 mm/sec 5.0 nm (17.4 ft) (8 in/sec) (10 in/sec) (14 in/sec) (0.2 uin) High lambda/256 or +/-2.65 m 102 mm/sec 127 mm/sec 178 mm/sec Resolution 2.5 nm (8.7 ft) (4 in/sec) (5 in/sec) (7 in/sec) (0.1 uin)
• *Maximum axis velocity depends on the combination of laser heads and optics used for the axis.
• General Information
• VME Compliance:
• Complies with VME Specification Rev. C.1 6U size
• A16 Data Transfer Cycles
• A24 Data Transfer Cycles
• D16 Data Transfer Cycles
• D32 Data Transfer Cycles
• D08(0) Interrupt acknowledge cycles
• Power Requirements: 5Vdc +0.25 V/-0.125 V at less than 2.8 A
• Cooling Requirements:
• 19 linear meters (60 linear feet) per minute for 0-40 degrees C operation 76 linear meters (250 linear feet) per minute minimum for 0-55 degrees C operation.
• 1000001059 Cables:
• Agilent 10790A/B/C Receiver Cable
• Agilent 10791A/B/C Laser Head Cable
• Weight: 0.45 kg (1 lb)
• Fast and easy data access for open- and closed-loop, and custom servo board applications
• Full electrical and mechanical compliance with VMEbus specifications
• Multiple input signal options speed system integration
• Integrated board functions reduce system size, cost, and complexity